Pyrotron - UV Detector
Flame Detector in Diffusion Furnace Tubes - The Ultimate Clean Room
Safety Device.
Advantages
  Sensitive and fast detection of different types of gases
and chemicals.
"Sun blind" sensor installs at the tube source.
Specific flame wave length detection is 180nm.
Easily adaptable to different quartz fittings
Description
Senses harmful gas leaks in the wafer process.
Ensures flame operation inside the tube - automatic process shut
off if no flame detected.
Pyrotron controller interfaces with the furnace controller and is
connected to H2 or chemical source carrier gas. |
