High Temperature Recirculating Bath
 The
Modutek QFa Series of High Temperature Recirculating Baths is the
result of almost 20 years of evolutionary bath design and a passion
for establishing the quality standard in quartz baths. At Modutek,
we define quality by the degree of safety, reliability, and cost of
ownership. These values are engineered into every aspect of our products.
The Modutek QFa Series of High Temperature
Recirculating Baths is the result of almost 20 years of evolutionary
bath design and a passion for establishing the quality standard
in quartz baths. At Modutek, we define quality by the degree of
safety, reliability, and cost of ownership integrated into every
aspect of our baths.
| Features |
Benefits |
| Nested 4-sided heating element |
Faster, more even heating |
| 360° serrated overflow weir |
Facilitates laminar flow while minimizing
particulate contamination |
| Dual safety snap switch |
Minimizes damages resulting from runaway
temperatures |
| Seamless, sloped flange design |
Improves uptime and reliability due
to longer vessel life |
Materials of Construction |
| Process Vessel |
Semiconductor grade, flame-polished, quartz |
| Housing |
UL-94 VO rated FRPP |
| Insulation |
High density alumina silica fiber rated to 1260°
C |
System Specifications |
| Applications |
Etching, Stripping, Cleaning |
| Chemical usage |
H2SO4, H2O2,
HCl, etc. |
| Operating temperature range |
30° - 180° C |
| Process temperature control |
± 1° C (depends on controller and process) |
| Heat-up rate |
2° C per minute (rate affected by size of system,
fluid, etc.) |
| Circulating fluid inlet/outlet |
¾" Male Flaretek |
Facility Requirements |
| Electrical |
208VAC, 50/60Hz, 1Ø (Current requirements depend
on bath size) |
Options
 Modutek C1915a Process Temperature Controller
Inline infrared heater
Liquid Level Sensor
Process Thermocouple
Quartz Diffuser Plate
Autolid
Custom vessel sizes
| Model |
Model Deck Cutout
L x W x D (in) |
Deck Area
L x W (in) |
Vessel
L x W x H (in) |
| QFa16 |
13.88 x 12.63 x 16.00 |
15.63 x 14.38 |
7.75 x 7.75 x 9.00 |
| QFa18 |
18.38 x 16.13 x 17.38 |
20.13 x 17.88 |
12.00 x 11.00 x 10.50 |
| QFa24 |
17.63 x 12.38 x 13.25 |
19.38 x 14.13 |
11.50 x 7.50 x 7.00 |
| QFa25 |
19.63 x 12.38 x 14.25 |
21.38 x 14.13 |
13.50 x 7.50 x 8.00 |
| QFa26 |
22.25 x 13.00 x 16.00 |
24.00 x 14.75 |
16.00 x 8.00 x 9.00 |
| QFa28 |
27.88 x 16.63 x 17.38 |
29.63 x 18.38 |
21.50 x 11.50 x 10.50 |
For more information on Modutek product
lines visit their website at http://www.modutek.com |
