Indirect Megasonic Systems
 The
MSI Series of Indirect Megasonic Systems offers the newest and best
choice for semiconductor wafer, hard disk and flat panel cleaning,
etch and strip applications. In head-to-head tests with other Megasonic
brands, Modutek's MSI Series comes out on top. Modutek's MSI Series
has the ability to remove tough 0.1µm particles and operate at temperatures
up to 160°C.
The Modutek MSI Series of Indirect Megasonic
Systems offers the newest and best choice for semiconductor wafer,
hard disk, and flat panel cleaning, etch, and strip applications.
In head-to-head tests with other megasonic brands, Modutek’s MSI
Series consistantly comes out on top. With the ability to remove
those tough 0.1m m particles and operate at temperatures up to 160°
C, you can be sure that your process will turn out a quality product
time and time again.
Applications
 Cleaning
Etch
Strip
Materials of Construction |
| Inner Vessel |
GE124 Quartz |
| Outer Vessel |
NPP, PVDF, or electropolished 316SS |
| Process Fittings |
Quartz & Teflon Flaretek style |
Other materials
available upon request |
System Specifications |
| Operating Temp |
up to 160° C |
| Particle Removal |
to 0.1m |
| Transducers |
Number required depends on configuration |
| Individual transducers rated up to 300W each |
Configuration |
| Style |
Overflow/Recirculating |
| Quick Dump Rinsers |
| Static |
| Standard Sizes |
single and dual 150mm |
| single and dual 200mm |
| single 300mm |
Custom Sizes
Available |
For more information on Modutek product lines
visit their website at http://www.modutek.com |
