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Equipment List

 Diffusion & CVD

4-Point Probe Systems - contact sgt
External Pyrogenic Torches
Hydrogen Burn Boxes
Control low vapor pressure liquid source gases

(e.g Dichloro Silane): eliminates condensation in lines & MFC's

 C-V Measurement Systems
Epi Bell Jar Cleaners
Wafer Cleaning Baths

 Photo & Etch

Resist coat Parts Cleaners
Resist Strip Tanks

Etch Filter/Recirculation Baths

Megasonic Tanks
Control of BCl3 etch gas delivery; eliminates condensation in lines & MFC's

 Metrology
C-V Measurement Systems
4-Point Probe Systems - contact sgt		 Failure Analysis Tools: Liquid Crystals, Polishing, Decapsulation

 Deposition
Centura Parts Cleaner
Sputter Shield Cleaner
4-Point Probe Systems for thickness measurement - contact sgt
 C-V Measurement Systems
C-V Shadow mask for Sputter

 
 Miscellaneous 
HEPA Integrated Fan/filter Units
Semiconductor Process Seminars
Yield & Failure Analysis Seminars
Gas pressure control - eliminates condensation in lines & MFC's 		Wafer Reclaim System
Semiconductor Technology Handbook & CDROM - contact sgt Failure Analysis Handbook & CDROM - contact sgt