| Accurate Gas Control Systems |
|
AGM Series Chiller/Heater Recirculator
 Typical
applications include:
 Etcher Cooling
CVD Cooling
Power Supply Cooling
Gas Cylinder Cooling/Heating
Medical Equipment
Cooling
Laser Cooling
The AGM Chiller/Heater Recirculators provide
a reliable solution for temperature control of semiconductor process
tools or any equipment which requires cooling or heating. The chiller/heater
can be utilized as stand alone unit or multiple units can be stacked
and cabinet mounted for centralized temperature control. The AGM
features 20,000 hours MTBF, I/O port options and a small footprint.
The temperature control of the AGM is accurate and stable (+-2°C).
The AGM Recirculators operate in a closed
loop, saving water and allowing a wide temperature control range.
The control system provides several safety features, displays temperature
setpoint values, process temperature values and alarm messages.
The controller is easily programmed with clearly stated prompt messages.
Factory support is provided around the world. Please contact Accurate
GAs Control Systems, Inc. with your specific requirements for other
options.
|
